QUEST 2025
Progress on fabrication of superconducting structures at 300 mm wafer scale
E. Bhatia (NY CREATES); Z. Xiao (NY CREATES); C. Kow (NY CREATES); J. Nalaskowski (NY CREATES); G. Telhu (NY CREATES); B. Egan (NY CREATES); N. Pieniazek (NY CREATES); D. Romero (NY CREATES); J. Mucci (NY CREATES); W. Collison (NY CREATES); S. Olson (NY CREATES); P.Y. Hung (NY CREATES); B. Martinick (NY CREATES); K. Musick (NY CREATES); S. Schujmann (NY CREATES); A. Biedron (NY CREATES); T. Murray (NY CREATES);
NY CREATES is working on utilizing state-of-the-art wafer process technology at its 300 mm wafer fab in Albany, NY, to develop cutting edge superconducting technologies. Progress made at NY CREATES over the past year in superconducting device fabrication will be presented in areas ranging from photon detectors to qubits. Advances enabled by process tools capable of tight control over film composition, and those incorporating in situ process monitors to target nanometer-level control in reactive ion etch, CMP and other process technologies will be discussed. Experiments on novel surface treatments to address two-level systems found on surfaces of superconducting metals that can influence coplanar waveguide resonator quality factor will be discussed. Ongoing efforts towards the development of nitride-based superconducting nanowire single photon detectors and Ta-based qubits at 300 mm scale will be presented, along with an update on the establishment of a superconducting quantum PDK that will support a multi-project wafer program.
Acknowledgement
Funding from US Department of Energy, US Department of Defense, and NY CREATES is gratefully acknowledged.
Invited
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Fabrication
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October 28, 10:40 → 11:05